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SAB9510-半自动
超原子束TRIM机

SAB9510是一款全自动的超原子束表面TRIM机,可通过Cassette自动上下料,适用于半导体薄膜超精密TRIM批量化生产。

4-12寸
兼容尺寸
800 Å*cm²/s
@Si(SiO2
刻蚀速率
<5mm
半高宽束斑尺寸
60kV
离子能量
≤1nm
TRIM后膜厚Range
SAB9510-半自动 超原子束TRIM机
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